초음파 정밀세정장치(cn)
| 대표분류 | 전기소자 | ||
|---|---|---|---|
| 연구기관 | 한국기계연구원 | 연구자 | 이양래외 4인 |
| 기술내용 |
이전대상 특허번호: 102725825(중국) 이전유형: 전용/통상실시권 기술료: 전용실시 200만원 이상/통상실시 100만 이상(3년) 비고: 부가세 별도 Disclosed is an ultrasonic cleaning apparatus, which generates uniform sound pressure across a wide area of a piezoelectric element without the sound pressure being concentrated into the middle of the piezoelectric element to thereby increase cleaning efficiency without damage of an object to be cleaned. The ultrasonic precision cleaning apparatus includes: a cleaning solution supplier for supplying a cleaning solution to an object to be cleaned; an transmitter (transducer)having a piezoelectric element having a ceramic body and upper and lower electrodes respectively deposited to upper and lower portions of the ceramic body and producing ultrasonic waves, an ultrasonic waveguide coupled to a tip of the piezoelectric element, placed opposite to the object to be cleaned and transmitting the ultrasonic waves produced from the piezoelectric element to the object to be cleaned, a housing and a power line, wherein the piezoelectric element or the middle of the ultrasonic transmitter is formed with a vertical hole. |
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| 자료집 | 다운로드 | ||