입자형 다결정 실리콘의 제조방법 및 제조장치
| 대표분류 | 화학 | ||
|---|---|---|---|
| 연구기관 | 한국화학연구원 | 연구자 | 박용기 |
| 기술내용 |
이전대상 특허번호: 12/282604(미국) 이전유형: 양도 기술료: 550만원(부가세포함) 비고: - A process for preparing granular polysilicon using a fluidized bed reactor is disclosed. Upper and lower spaces of the bed are the reaction zone and heating zone, respectively, wherein the height of the reaction gas outlet is the reference height. Reactor productivity is maximized by sufficiently providing the heat required and stably maintaining the reaction temperature in the reaction zone, without impairing the mechanical stability of the fluidized bed reactor. This is achieved through electrical resistance heating in the heating zone where an internal heater is installed between the reaction gas supplying means and the inner wall of the reactor tube, thereby heating the fluidizing gas and the silicon particles in the heating zone. The heat generated is transferred to the reaction zone by supplying the fluidizing gas at a rate silicon particles can be intermixed between the reaction zone and the heating zone in a continuous, fluidized state. |
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