입자형 다결정실리콘 제조용 고압 유동층반응기
| 대표분류 | 기타 | ||
|---|---|---|---|
| 연구기관 | 한국화학연구원 | 연구자 | 김희영 |
| 기술내용 |
이전대상 특허번호: 12/093513(미국) 이전유형: 양도 기술료: 550만원(부가세포함) 비고: - The present invention relates to a high-pressure fluidized bed reactor for preparing granular polycrystalline silicon, comprising (a) a reactor tube, (b) a reactor shell encompassing the reactor tube, (c) an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the reactor tube, which is maintained under the inert gas atmosphere, and (d) a controlling means to keep the difference between pressures in the inner zone and the outer zone being maintained within the range of 0 to 1 bar, thereby enabling to maintain physical stability of the reactor tube and efficiently prepare granular polycrystalline silicon even at relatively high reaction pressure. |
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