혼합된 코어수단을 이용한 다결정실리콘 봉 제조 방법 및 장치
| 대표분류 | 도금 | ||
|---|---|---|---|
| 연구기관 | 한국화학연구원 | 연구자 | 김희영 |
| 기술내용 |
이전대상 특허번호: 12/160241(미국) 이전유형: 양도 기술료: 550만원(부가세포함) 비고: - Disclosed are a method and an apparatus for preparing a polycrystalline silicon rod using a mixed core means, comprising: installing a first core means made of a resistive material together with a second core means made of silicon material in an inner space of a deposition reactor; electrically heating the first core means and pre-heating the second core by the first core means which is electrically heated; electrically heating the preheated second core means; and supplying a reaction gas into the inner space in a state where the first core means and the second core means are electrically heated for silicon deposition. |
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| 자료집 | 다운로드 | ||